Sputtering & Thermal Evaporation Coater
Sputtering & Thermal Evaporation Coater
- Sputtering and Thermal evaporation process in a compact system High vacuum level
- Equipped with DC and RF power supplies suitable for metals, semiconductors and dielectrics
- Multilayer deposition
- Quartz crystal monitoring system for real time thickness measurement
- Manual or automatic Timed or Thickness deposition
- Intuitive touch screen control system
The DST3-T is a triple-target, turbo molecular-pumped, multi vacuum coater system, combines thermal evaporator and sputter coater in one single compact desktop system. It is suitable for deposition of a wide range of materials. The system can easily switch between evaporation and sputtering condition (Not simultaneously). The DST3-T is equipped with a large chamber (300 mm diameter) and three 2” diameter water cooled cathodes which make it suitable for long time deposition. The magnetron desk sputter coater is equipped with RF and DC power supplies. It can sputter semiconductors, dielectrics a
